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Effects of plasma enhancement on the carrier-gas-free metalorganic chemical-vapor deposition of oxide superconducting thin films
Kanehori, KeiichiVolume:
12
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.578908
Date:
January, 1994
File:
PDF, 692 KB
english, 1994