Small microwave ion source for an ion implanter

Review of Scientific Instruments 1996 Vol. 67; Iss. 3

Small microwave ion source for an ion implanter

Song, Zhizhong, Jiang, Dong, Yu, Jinxiang
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Volume:
67
Year:
1996
Language:
english
Journal:
Review of Scientific Instruments
DOI:
10.1063/1.1146797
File:
PDF, 338 KB
english, 1996
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