New magnesium doping source for metalorganic chemical vapor...

New magnesium doping source for metalorganic chemical vapor deposition: Octamethyldialuminummonomagnesium

Hatano, Ako, Izumiya, Toshihide, Ohba, Yasuo
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Volume:
58
Year:
1991
Language:
english
Journal:
Applied Physics Letters
DOI:
10.1063/1.105179
File:
PDF, 560 KB
english, 1991
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