New magnesium doping source for metalorganic chemical vapor deposition: Octamethyldialuminummonomagnesium
Hatano, Ako, Izumiya, Toshihide, Ohba, YasuoVolume:
58
Year:
1991
Language:
english
Journal:
Applied Physics Letters
DOI:
10.1063/1.105179
File:
PDF, 560 KB
english, 1991