Fully automated hot embossing processes utilizing high...

Fully automated hot embossing processes utilizing high resolution working stamps

Glinsner, T., Veres, T., Kreindl, G., Roy, E., Morton, K., Wieser, T., Thanner, C., Treiblmayr, D., Miller, R., Lindner, P.
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Volume:
28
Year:
2010
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.3269800
File:
PDF, 1.92 MB
english, 2010
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