Tungsten metallization for stable and self-aligned...

Journal of Applied Physics 1990 Vol. 68; Iss. 7

Tungsten metallization for stable and self-aligned InP-based laser devices

Katz, A., Pearton, S. J., Geva, M.
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Volume:
68
Year:
1990
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.346405
File:
PDF, 643 KB
english, 1990
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