Adhesive Force Characterization for MEM Logic Relays With...

Adhesive Force Characterization for MEM Logic Relays With Sub-Micron Contacting Regions

Yaung, Jack, Hutin, Louis, Jeon, Jaeseok, Liu, Tsu-Jae King
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Volume:
23
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/jmems.2013.2269995
Date:
February, 2014
File:
PDF, 524 KB
english, 2014
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