Evolution of the electron energy distribution function in a planar inductive argon discharge
Seo, Sang-Hun, Kim, S. S., Hong, Jung-In, Chang, C. S., Chang, Hong-YoungVolume:
76
Year:
2000
Language:
english
Journal:
Applied Physics Letters
DOI:
10.1063/1.125685
File:
PDF, 247 KB
english, 2000