![](/img/cover-not-exists.png)
Poly (ethylene terephthalate) decomposition process in oxygen plasma; emission spectroscopic and surface analysis for oxygen–plasma reaction
Kumagai, Hidetoshi, Hiroki, Denbo, Fujii, Nobuyuki, Kobayashi, TakaomiVolume:
22
Year:
2004
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.1624286
File:
PDF, 459 KB
english, 2004