Structure and properties of nanocrystalline ZrN[sub x]O[sub...

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films 2011 Vol. 29; Iss. 3

Structure and properties of nanocrystalline ZrN[sub x]O[sub y] thin films: Effect of the oxygen content and film thickness

Lan, Kuan-Che, Hunag, Jia-Hong, Ai, Chi-Fong, Yu, Ge-Ping
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Volume:
29
Year:
2011
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.3565487
File:
PDF, 1.03 MB
english, 2011
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