Hydrogen pressure dependence of trench corner rounding...

Hydrogen pressure dependence of trench corner rounding during hydrogen annealing

Kuribayashi, Hitoshi, Shimizu, Ryosuke, Sudoh, Koichi, Iwasaki, Hiroshi
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Volume:
22
Year:
2004
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.1760752
File:
PDF, 965 KB
english, 2004
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