Hydrogen pressure dependence of trench corner rounding during hydrogen annealing
Kuribayashi, Hitoshi, Shimizu, Ryosuke, Sudoh, Koichi, Iwasaki, HiroshiVolume:
22
Year:
2004
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.1760752
File:
PDF, 965 KB
english, 2004