Nonuniform radio-frequency plasma potential due to edge...

Journal of Applied Physics 2004 Vol. 96; Iss. 10

Nonuniform radio-frequency plasma potential due to edge asymmetry in large-area radio-frequency reactors

Howling, A. A., Sansonnens, L., Ballutaud, J., Hollenstein, Ch., Schmitt, J. P. M.
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Volume:
96
Year:
2004
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.1803608
File:
PDF, 495 KB
english, 2004
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