Perturbation theory for surface-profile imaging with a...

Applied Physics Letters 2000 Vol. 77; Iss. 13

Perturbation theory for surface-profile imaging with a capacitive probe

Garcı́a-Valenzuela, A., Bruce, N. C., Kouznetsov, D.
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Volume:
77
Year:
2000
Language:
english
Journal:
Applied Physics Letters
DOI:
10.1063/1.1312852
File:
PDF, 256 KB
english, 2000
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