E→H mode transition density and power in two types of...

E→H mode transition density and power in two types of inductively coupled plasma configuration

Wang, Jian, Du, Yin-chang, Zhang, Xiao, Zheng, Zhe, Liu, Yu, Xu, Liang, Wang, Pi, Cao, Jin-xiang
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Volume:
21
Language:
english
Journal:
Physics of Plasmas
DOI:
10.1063/1.4886147
Date:
July, 2014
File:
PDF, 677 KB
english, 2014
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