[IEEE 2014 25th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) - Saratoga Springs, NY (2014.5.19-2014.5.21)] 25th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC 2014) - Early detection of pattern defects on PDI wafers
Teagle, Robert F., Lavigne, Erin C., Mont, Frank Wilhelm, Fei Wang,, HungYu Tien,, YuanChi Chiang,, Tomlinson, DerekYear:
2014
Language:
english
DOI:
10.1109/asmc.2014.6847023
File:
PDF, 743 KB
english, 2014