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[IEEE 2009 34th IEEE Photovoltaic Specialists Conference (PVSC) - Philadelphia, PA, USA (2009.06.7-2009.06.12)] 2009 34th IEEE Photovoltaic Specialists Conference (PVSC) - Comparative study of low-temperature PECVD Of amorphous silicon using mono-, di-, trisilane and cyclohexasilane
Pokhodnya, Konstantin, Sandstrom, Joseph, Olson, Chris, Dai, Xuliang, Boudjouk, Philip R., Schulz, Douglas L.Year:
2009
Language:
english
DOI:
10.1109/pvsc.2009.5411459
File:
PDF, 2.84 MB
english, 2009