Selective edge lithography for fabricating imprint molds...

Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures 2013 Vol. 31; Iss. 6

Selective edge lithography for fabricating imprint molds with mixed scale patterns

Noma, Hayato, Kawata, Hiroaki, Yasuda, Masaaki, Hirai, Yoshihiko, Sakamoto, Junji
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Volume:
31
Year:
2013
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.4827814
File:
PDF, 1.54 MB
english, 2013
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