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Atomic mixing and electron range effects in ultrahigh-resolution profiles of the Ta2O5/Ta interface by argon sputtering with Auger electron spectroscopy
Seah, M. P., Hunt, C. P.Volume:
56
Year:
1984
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.334209
File:
PDF, 822 KB
english, 1984