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Theoretical investigations on electron trap generation by fluorine atoms in SiO2 film
Yokozawa, A., Hirose, K., Ishitani, A., Kamoshida, M., Hillenius, S., Gilmer, G., Raghavachari, K.Volume:
77
Year:
1995
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.359105
File:
PDF, 954 KB
english, 1995