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Electron-temperature control in 915 MHz electron cyclotron resonance plasma
Itagaki, N., Kawai, Y., Kawakami, S., Ishii, NobuoVolume:
20
Year:
2002
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.1513791
File:
PDF, 475 KB
english, 2002