![](/img/cover-not-exists.png)
Evolution of microstructures in hydrogenated silicon films prepared by diluted-hydrogen and hydrogen-atom-treatment methods
Hsu, Kuo-Chiang, Chang, Hua, Hwang, Huey-LiangVolume:
73
Year:
1993
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.353799
File:
PDF, 1.15 MB
english, 1993