Pattern preserving deposition: Experimental results and modeling
Castez, Marcos F., Fonticelli, Mariano H., Azzaroni, Omar, Salvarezza, Roberto C., Solari, Hernán G.Volume:
87
Year:
2005
Language:
english
Journal:
Applied Physics Letters
DOI:
10.1063/1.2053368
File:
PDF, 386 KB
english, 2005