The effects of ion sheath collisions on trench etch...

The effects of ion sheath collisions on trench etch profiles

Chen, Wenjing, Abraham-Shrauner, Barbara
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Volume:
81
Year:
1997
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.363918
File:
PDF, 432 KB
english, 1997
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