Synthesis of crystalline Si quantum dots by millisecond laser irradiation of SiO[sub x]N[sub y] layers
Mannino, Giovanni, Spinella, Corrado, Bongiorno, Corrado, Nicotra, Giuseppe, Mercorillo, Flora, Privitera, Vittorio, Franzò, Giorgia, Piro, Alberto Maria, Grimaldi, MariaGrazia, Di Stefano, Maria AusVolume:
107
Year:
2010
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.3282660
File:
PDF, 675 KB
english, 2010