![](/img/cover-not-exists.png)
Filtered cathodic arc deposition with ion-species-selective bias
Anders, André, Pasaja, Nitisak, Sansongsiri, SakonVolume:
78
Year:
2007
Language:
english
Journal:
Review of Scientific Instruments
DOI:
10.1063/1.2745229
File:
PDF, 506 KB
english, 2007