[IEEE 2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII) - Barcelona, Spain (2013.06.16-2013.06.20)] 2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII) - A new self-sealing thin-film encapsulation process for MEMS
Santagata, F., Zaccaria, I., Poelma, R. H., Creemer, J. F., Zhang, G. Q., Sarro, P. M.Year:
2013
Language:
english
DOI:
10.1109/transducers.2013.6626893
File:
PDF, 1.31 MB
english, 2013