Interaction of hydrogen atoms with Si(111) surfaces: Adsorption, abstraction, and etching
Dinger, A., Lutterloh, C., Küppers, J.Volume:
114
Year:
2001
Language:
english
Journal:
The Journal of Chemical Physics
DOI:
10.1063/1.1351158
File:
PDF, 538 KB
english, 2001