Identification of CoSi inclusions within buried CoSi2...

Journal of Applied Physics 1990 Vol. 68; Iss. 7

Identification of CoSi inclusions within buried CoSi2 layers formed by ion implantation

De Veirman, A., Van Landuyt, J., Reeson, K. J., Gwilliam, R., Jeynes, C., Sealy, B. J.
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Volume:
68
Year:
1990
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.346308
File:
PDF, 660 KB
english, 1990
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