Role of the indium–carbon interaction on In diffusion and...

Role of the indium–carbon interaction on In diffusion and activation in Si

La Magna, Antonino, Scalese, Silvia, Alippi, Paola, Mannino, Giovanni, Privitera, Vittorio, Bersani, Massimo, Zechner, Christoph
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Volume:
83
Year:
2003
Language:
english
Journal:
Applied Physics Letters
DOI:
10.1063/1.1609253
File:
PDF, 313 KB
english, 2003
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