Role of the indium–carbon interaction on In diffusion and activation in Si
La Magna, Antonino, Scalese, Silvia, Alippi, Paola, Mannino, Giovanni, Privitera, Vittorio, Bersani, Massimo, Zechner, ChristophVolume:
83
Year:
2003
Language:
english
Journal:
Applied Physics Letters
DOI:
10.1063/1.1609253
File:
PDF, 313 KB
english, 2003