Development of compact synchrotron light source for x-ray...

Review of Scientific Instruments 1989 Vol. 60; Iss. 7

Development of compact synchrotron light source for x-ray lithography (abstract)

Mandai, S., Hoshi, Y., Kohno, Y.
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Volume:
60
Year:
1989
Language:
english
Journal:
Review of Scientific Instruments
DOI:
10.1063/1.1140906
File:
PDF, 323 KB
english, 1989
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