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Room temperature synthesis of porous SiO[sub 2] thin films by plasma enhanced chemical vapor deposition
Barranco, A., Cotrino, J., Yubero, F., Espinós, J. P., González-Elipe, A. R.Volume:
22
Year:
2004
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.1761072
File:
PDF, 1.03 MB
english, 2004