[IEEE TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference - Lyon, France (2007.06.10-2007.06.14)] TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference - Realization of Thin Film Specimens for Micro Tensile Tests
Malhaire, Christophe, Ignat, Michel, Dogheche, Karim, Brida, Sebastiano, Josserond, Charles, Debove, LaurentYear:
2007
Language:
english
DOI:
10.1109/sensor.2007.4300207
File:
PDF, 2.27 MB
english, 2007