[Japan Soc. of Appl. Phys Digest of Papers Microprocesses...

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[Japan Soc. of Appl. Phys Digest of Papers Microprocesses and Nanotechnology 2003. 2003 International Microprocesses and Nanotechnology Conference - Tokyo, Japan (29-31 Oct. 2003)] Digest of Papers Microprocesses and Nanotechnology 2003. 2003 International Microprocesses and Nanotechnology Conference - Modeling clear phase-mask materials for sub-50 nm X-ray application

Malueg, D.H., Cerrina, F., Taylor, J.W.
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Year:
2003
Language:
english
DOI:
10.1109/imnc.2003.1268761
File:
PDF, 50 KB
english, 2003
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