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Silicon carbonitrides: On the attainability of stable compounds with high nitrogen content
Rudolphi, M., Baumann, H., Geckle, U., Bruns, M.Volume:
26
Year:
2008
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.2924331
File:
PDF, 711 KB
english, 2008