![](/img/cover-not-exists.png)
The superconducting x-ray lithography source program at Brookhaven (invited)
Williams, G. P., Heese, R. N., Vignola, G., Murphy, J. B., Godel, J. B., Hsieh, H., Galayda, J., Seifert, A., Knotek, M. L.Volume:
60
Year:
1989
Language:
english
Journal:
Review of Scientific Instruments
DOI:
10.1063/1.1141046
File:
PDF, 479 KB
english, 1989