![](/img/cover-not-exists.png)
Tailored stoichiometries of silicon carbonitride thin films prepared by combined radio frequency magnetron sputtering and ion beam synthesis
Bruns, M., Geckle, U., Trouillet, V., Rudolphi, M., Baumann, H.Volume:
23
Year:
2005
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.1946713
File:
PDF, 399 KB
english, 2005