Si[sub 0.85]Ge[sub 0.15] oxynitridation in nitric...

Journal of Applied Physics 2003 Vol. 94; Iss. 1

Si[sub 0.85]Ge[sub 0.15] oxynitridation in nitric oxide/nitrous oxide ambient

Dasgupta, Anindya, Takoudis, Christos G., Lei, Yuanyuan, Browning, Nigel D.
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Volume:
94
Year:
2003
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.1576489
File:
PDF, 432 KB
english, 2003
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