[IEEE 2007 IEEE Pulsed Power Plasma Science Conference - Albuquerque, NM, USA (2007.06.17-2007.04.22)] 2007 IEEE Pulsed Power Plasma Science Conference - Tin-Fueled High-Repetition-Rate Z-pinch EUV Source for Semiconductor Lithography
Teramoto, Yusuke, Narihiro, Zenzo, Yamatani, Daiki, Yokoyama, Takuma, Bessho, Kazunori, Joshima, Yuki, Shirai, Takahiro, Mouri, Shinsuke, Inoue, Takahiro, Mizokoshi, Hiroshi, Yabuta, Hironobu, Paul, KYear:
2007
Language:
english
DOI:
10.1109/ppps.2007.4345917
File:
PDF, 52 KB
english, 2007