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Spectroscopic study on rotational and vibrational temperature of N[sub 2] and N[sub 2][sup +] in dual-frequency capacitively coupled plasma
Huang, Xiao-Jiang, Xin, Yu, Yang, Lei, Yuan, Quan-Hua, Ning, Zhao-YuanVolume:
15
Year:
2008
Language:
english
Journal:
Physics of Plasmas
DOI:
10.1063/1.3025826
File:
PDF, 338 KB
english, 2008