Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
2011 Vol. 29; Iss. 4
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Influence of gate metallization processes on the electrical characteristics of high-k/In[sub 0.53]Ga[sub 0.47]As interfaces
Burek, Greg J., Hwang, Yoontae, Carter, Andrew D., Chobpattana, Varistha, Law, Jeremy J. M., Mitchell, William J., Thibeault, Brian, Stemmer, Susanne, Rodwell, Mark J. W.Volume:
29
Year:
2011
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.3610989
File:
PDF, 629 KB
english, 2011