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Simultaneous real-time x-ray diffraction spectroscopy, Rutherford backscattering spectrometry, and sheet resistance measurements to study thin film growth kinetics by Kissinger plots
Smeets, D., Demeulemeester, J., Deduytsche, D., Detavernier, C., Comrie, C. M., Theron, C. C., Lavoie, C., Vantomme, A.Volume:
104
Year:
2008
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.3021110
File:
PDF, 562 KB
english, 2008