Optimization of n[sup +]μc-Si:H contact layer for low leakage current in a-Si:H thin film transistors
Murthy, R. V. R., Servati, P., Nathan, A., Chamberlain, S. G.Volume:
18
Year:
2000
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.582248
File:
PDF, 383 KB
english, 2000