Physics of high-pressure helium and argon radio-frequency...

Journal of Applied Physics 2004 Vol. 96; Iss. 12

Physics of high-pressure helium and argon radio-frequency plasmas

Moravej, M., Yang, X., Nowling, G. R., Chang, J. P., Hicks, R. F., Babayan, S. E.
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Volume:
96
Year:
2004
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.1815047
File:
PDF, 428 KB
english, 2004
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