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Incompatibility of standard III–V compound semiconductor processing techniques with terbium-doped InGaAs of high terbium concentration
Ramu, Ashok T., Clinger, Laura E., Dongmo, Pernell B., Imamura, Jeffrey T., Zide, Joshua M. O., Bowers, John E.Volume:
30
Year:
2012
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.3701951
File:
PDF, 1.30 MB
english, 2012