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Radio frequency dual magnetron sputtering deposition and characterization of nanocomposite Al[sub 2]O[sub 3]–ZrO[sub 2] thin films
Trinh, D. H., Högberg, H., Andersson, J. M., Collin, M., Reineck, I., Helmersson, U., Hultman, L.Volume:
24
Year:
2006
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.2171709
File:
PDF, 1.17 MB
english, 2006