Local bonding environment of plasma deposited nitrogen-rich...

Journal of Applied Physics 2005 Vol. 97; Iss. 9

Local bonding environment of plasma deposited nitrogen-rich silicon nitride thin films

Soh, Martin T. K., Savvides, N., Musca, Charles A., Martyniuk, Mariusz P., Faraone, Lorenzo
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Volume:
97
Year:
2005
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.1889236
File:
PDF, 513 KB
english, 2005
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