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Substrate bias effect on the formation of nanocrystalline diamond films by microwave plasma-enhanced chemical vapor deposition
Yang, Tien-Syh, Lai, Jir-Yon, Wong, Ming-Show, Cheng, Chia-LiangVolume:
92
Year:
2002
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.1492864
File:
PDF, 735 KB
english, 2002