Influence of magnetic field on the self‐bias potential on a radio frequency‐powered electrode in radio frequency plasma
Tsuzuki, K., Tabuchi, S., Banno, T., Kinbara, A., Nakagawa, Y., Tsukada, T.Volume:
11
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.578789
Date:
May, 1993
File:
PDF, 586 KB
english, 1993