Measurement of ion charge state distributions inside electron cyclotron resonance neon and chlorine plasmas by x-ray spectroscopy
Grübling, P., Küchler, D., Ullrich, A., Werner, T., Zschornack, G.Volume:
69
Year:
1998
Language:
english
Journal:
Review of Scientific Instruments
DOI:
10.1063/1.1148808
File:
PDF, 386 KB
english, 1998