Evaluation of plasma charging damage during polysilicon...

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films 1998 / 5 Vol. 16; Iss. 3

Evaluation of plasma charging damage during polysilicon gate etching process in a decoupled plasma source reactor

Ma, Shawming
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Volume:
16
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.581165
Date:
May, 1998
File:
PDF, 882 KB
english, 1998
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