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The study of a fundamental law in extracting metal ions from a rf ion source by applying a plasma chemical reaction
Guibin, Bai, Xiuling, Shi, Zhaoxing, MengVolume:
63
Year:
1992
Language:
english
Journal:
Review of Scientific Instruments
DOI:
10.1063/1.1142891
File:
PDF, 599 KB
english, 1992